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EE 626 Microelectromechanical Systems (MEMS)

Spring 2026-2027 · 3 SU credits · 10 ECTS · Graduate

The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.

Alongside EE 626L

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Lecture — EE 626

SectionWhenWhereInstructorCRN
0 Tue 14:40–16:30
Wed 10:40–11:30		 FENS G032
FMAN L018		 Murat Kaya Yapıcı 20296 syllabus

Lab — EE 626L

SectionWhenWhereInstructorCRN
0 Thu 16:40–18:30 FASS G022 Murat Kaya Yapıcı 20297 syllabus

EE 626 — Sabancı Üniversitesi Spring 2026-2027 ders programı: section'lar, saatler, derslikler, CRN'ler ve syllabus bağlantıları.